In-Process Testing

Atomica offers the ability to adapt our tests to fit our customers’ specific application needs. The immediate feedback reduces development time and improves process optimization. Ultimately, this leads to faster time to market and higher yield.

Testing is critical to MEMS fabrication. Ultimately, Atomica needs to deliver wafers or devices that meet customer specifications. In order to do so, we need to test devices and control processes using metrology and other failure analysis techniques.

Metrology and Failure Analysis

The ability to obtain characteristics and measurements of devices and materials helps in verifying wafer processing and failure analysis. Atomica’s comprehensive metrology capability allows us to measure cross-section, CDs, thickness, width, optical, roughness, reflectivity, composition, etc. The following lists some of the capabilities at Atomica:

  • Odin Unity
  • Woollam M-2000 Ellipsometer
  • Accretech 200R – prober
  • Nanotronic S 200MM
  • FEI dual beam FIB/SEM with EDX
  • IVS 200 overlay measurement
  • Tencor surface profilers
  • CDE Resmap (sheet resistance)
  • Kevex automated XRF
  • SurfScan particle detection system
  • Digital Instruments AFM
  • Filmetrics spectrophotometers
  • Nicolet FTIR
  • FLEX 2320R BOW_STRESS TEST
  • Wyko non-contact surface profiler
  • High-volume automated optical linewidth measurement system with pattern recognition

Automated Electric Probing

In-process electrical testing of wafers includes various measurements, such as:

  • Capacitance
  • Resistance
  • Inductance
  • Isolation
  • High potential

Having this knowledge enables saving costs of producing devices. The end customer would only receive known-good-dies. Atomica also offers reliability, environmental, and life testing, as well as other custom testing specific to individual customer’s applications.

Other Capabilities

Why Atomica?

Atomica Corp. unleashes the power of Micro Electro-Mechanical Systems (MEMS) to help solve the great problems of our time. Utilizing a uniquely collaborative approach to development and manufacturing, it partners with innovative companies to deliver breakthrough MEMS-based solutions in cloud computing, autonomous vehicles, cell therapy, molecular diagnostics, genomics, 5G, the Internet of Things (IoT), and more. Atomica is the largest MEMS foundry in the USA, serving customers from its 130,000 ft2 manufacturing campus (including a 30,000 ft2 class 100 cleanroom) in Santa Barbara, California. The company is ISO 9001 certified and ITAR registered. Its extensive experience spans the full spectrum of MEMS, including photonics, sensors, microfluidic biochips, and other micro components.

Next Steps

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