Sensor platforms

Atomica’s sensor and actuator platforms use the Common Block Library (CBL), a set of standard, parameterized process blocks that supports rapid prototyping and scalable production. Customers can combine platforms, CBL blocks and custom layers to define the process flow for their device.

01.MOTION, INERTIAL AND ACTUATION

Accelerometer Platform

Standard proof-mass structures for acceleration sensing

Atomica’s Accelerometer Platform provides a standard foundation for devices that measure acceleration, tilt, shock and vibration. A suspended proof mass responds to motion, with capacitive, piezoresistive or piezoelectric sensing converting that response into a signal. Development considers proof-mass dimensions, spring stiffness, damping and packaging. Customers can combine the platform with other process blocks and custom layers to define their device flow.

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Gyroscope Platform

Vibrating MEMS structures for angular velocity measurement

The Gyroscope Platform provides a standard approach to MEMS devices that measure angular velocity through the Coriolis effect. Vibrating proof masses and nearby electrodes detect rotation through changes in capacitance. Fabrication considers mass and spring geometry, electrode placement, resonance control and mechanical noise. Hermetic packaging in a vacuum or controlled atmosphere helps preserve the resonating structures and their operating conditions.

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Comb Drive Platform

Electrostatic actuation with capacitive displacement sensing

Atomica’s Comb Drive Platform provides a standard approach to electrostatic actuators with fixed and movable interdigitated fingers. Applied voltage produces controlled motion, while changes in capacitance can indicate displacement. Finger width, spacing, etch quality and suspension stiffness shape the response. Development also considers drive voltage, anchors and feedback, allowing the platform to be combined with other MEMS elements for precise positioning.

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02.PRESSURE, ACOUSTIC AND ENVIRONMENTAL

Pressure Sensor Platform

Diaphragm and readout integration for pressure measurement

Atomica’s Pressure Sensor Platform provides a standard approach to devices that convert pressure-induced diaphragm deflection into an electrical signal. Sensing options include piezoresistive, capacitive, piezoelectric and resonant sensing methods. Development considers diaphragm thickness, residual stress, cavity formation and readout integration. Protective packaging allows pressure to reach the sensing element while addressing contamination and mechanical loads.

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Diaphragm Platform

Flexible membranes for pressure, force and acoustic response

The Diaphragm Platform provides a standard approach to thin, flexible membranes that respond to pressure, sound or mechanical force. Silicon, silicon nitride, polysilicon and polymer options balance flexibility with strength. Development considers thickness uniformity, cavity geometry, electrode spacing and residual stress. These membrane structures can be combined with other platforms and custom layers for sensing or actuation, with packaging suited to environmental access.

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Gas Sensor Platform

Sensing materials and interfaces for selective gas detection

Atomica’s Gas Sensor Platform provides a standard approach to devices that detect gases through interactions with a sensing material. Detection options include resistive, capacitive, electrochemical and optical detection methods. Material selection and surface functionalization address sensitivity and selectivity. Where heating is required, integrated heaters and thermal isolation manage operating temperature and power, while packaging maintains access to the target gas.

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03.MAGNETIC

Magnetic Sensor Platform

Sensing layers and geometries for magnetic field measurement

The Magnetic Sensor Platform provides a standard approach to detecting magnetic fields and converting them into electrical signals. Sensing options include Hall-effect, magnetoresistive and fluxgate sensing, with material and process choices suited to each mechanism. Fabrication considers thin-film uniformity, layer stacking, patterning and electrical contacts. Packaging, thermal stability and electronics integration are evaluated against the device requirements.

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Additional and custom sensor development

Some sensor designs require several platform elements or a different architecture. Atomica combines standard Common Block Library processes with custom layers to define a flow around the device’s sensing, mechanical and integration requirements.

We identify which established blocks fit the design and develop additional process steps for requirements the existing platforms do not address.

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Applications

Thermal imaging and infrared sensing

Vacuum wafer-level packaging for uncooled microbolometers and thermopiles

Thermal sensing reveals heat patterns for night vision, temperature screening and equipment monitoring. Uncooled microbolometers and thermopiles bring these functions to compact systems without a cooled detector.

Atomica supports these devices with advanced etching, getter deposition and vacuum wafer-level packaging, helping customers protect sensitive detector structures and control unwanted heat transfer.

Motion and inertial sensing

Acceleration and rotation measurement for navigation and stabilization

Acceleration and rotation measurements help drones maintain balance, vehicles track movement and robots control orientation. They also enable head tracking in AR and VR, gesture recognition in portable devices and vibration monitoring for industrial maintenance.

Atomica’s accelerometer and gyroscope platforms provide a fabrication starting point for devices tailored to the required range, sensitivity and operating conditions.

Microphones and acoustic sensing

Flexible membranes that respond to sound pressure in compact products

Acoustic sensing enables voice capture and audio interaction in phones, smart speakers and wireless earbuds. It also supports sound detection in hearing aids, where compact dimensions and sensitivity are important.

Atomica’s Diaphragm Platform provides flexible membranes that respond to sound pressure. Membrane geometry, sensing electrodes and packaging are developed around the device’s acoustic response and integration needs.

Gas sensing and environmental monitoring

Sensing materials and thermal management for selective gas detection

Gas measurements help identify leaks, monitor pollutants and guide ventilation in buildings and vehicle cabins. Industrial detection systems can alert operators to hazardous conditions, while portable monitors track exposure closer to the user.

Atomica’s Gas Sensor Platform supports development around the target gas and detection method, with sensing materials, thermal management and environmental access considered together.

Pressure, magnetic and force sensing

Feedback for motor control, fluid handling, medical monitoring and robotics

Pressure, magnetic field and force measurements provide feedback for motor control, fluid handling, medical monitoring and robotic grip. Contactless position and current sensing help systems track operation, while tactile sensing supports interaction with objects.

Atomica’s pressure, magnetic and diaphragm platforms support these functions. Comb drives add controlled movement and displacement sensing where actuation is needed.

Building sensors for physical AI?

Explore the Physical AI Sensor Platform for a coordinated approach to sensing, wafer-level packaging and through-wafer interconnect in AI-enabled systems.

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Why Atomica?

A manufacturable path from prototype to production

Atomica is a U.S.-based microfabrication foundry that turns advanced device concepts into manufacturable, scalable hardware — and its advantage is not a single process but a system that de-risks the path from first prototype to volume.

30,000 sq ft cleanroom · Class 100 · ISO 9001 certified · ITAR registered · Santa Barbara, USA

1

Engineering Collaboration

Atomica works as an engineering partner across design, materials, fabrication, and testing, bringing diverse expertise together to optimize each micro-scale device. That collaboration is what yields better products, lower cost, faster time-to-market, and quicker adaptation to emerging technologies.

2

Process Standardization

Standardized processes give a clear framework for fabrication, scaling, and quality control. This is what delivers the consistency, quality, and efficiency that reliable, high-performance microdevices require — while supporting regulatory compliance and continuous improvement.

3

Modeling & Simulation

Atomica evaluates designs before fabrication using physics-based modeling, FEA, CFD, AI, and multiphysics simulation. Simulating first reduces prototype iterations, lowers cost, identifies risks early, and improves first-pass success across photonics, sensors, biotech devices, MEMS, and integrated microsystems.

4

AI Optimization (FabOps)

Atomica’s FabOps system applies AI and advanced analytics across wafer inspection, metrology, fab control, and project execution. By integrating equipment, process flows, pricing, projects, and manufacturing — with real-time visibility, lot tracking, and change control — it reduces risk and accelerates programs from prototype to scalable production.

5

Fab Technology

Atomica operates a 30,000 sq ft, class-100 cleanroom near Santa Barbara, California — ISO 9001 certified and ITAR registered. Its full in-house process suite spans photolithography, deposition, dry and wet etch, bonding, plating, metrology, testing, dicing, and planarization, purpose-built for rapid prototyping and scalable production.

Explore Atomica’s in-depth resources to navigate modeling and simulation, rapid prototyping, scalable production, and fab evaluation — all with expert insight.

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Rapid Prototyping Services at Atomica

Uncover our efficient process that turns ideas into working prototypes swiftly, helping you bring innovations to life quickly.

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Scaling Production with Atomica’s Expertise

Explore how our advanced production methods ensure consistent, high-quality, and cost-effective results at every stage of scale.

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Inside Atomica’s Advanced Fab Technology

Take a detailed look at our high-tech capabilities, engineered to support complex, precision-driven microfabrication.

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Selecting the Right Fab for Your Project

Our Fab Evaluation Guide outlines essential criteria, ensuring your project is matched to the best fabrication partner.

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Simulation-Driven Microfabrication

See how modeling and simulation improve performance, lower cost, shorten timelines, and drive better outcomes.

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Next Steps

Developing a sensor that needs more than an off-the-shelf process? Talk to an Atomica engineer about your sensing structure, packaging and path to production.

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Evaluating a microfabrication partner for sensors? Download our Fab Evaluation Guide to compare capabilities, processes, and scale-readiness before you commit.

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